Title :
Improvements of resonance characteristics due to thermal annealing of Bragg reflectors in ZnO-based FBAR devices
Author :
Kim, Dong-Hyun ; Yim, Munhyuk ; Chai, Dongkyu ; Yoon, Giwan
Author_Institution :
Sch. of Eng., Inf. & Commun. Univ., Yusong, South Korea
fDate :
6/26/2003 12:00:00 AM
Abstract :
The effects of thermal annealing of W/SiO2 multilayer Bragg reflectors on the resonance characteristics of ZnO-based film bulk acoustic resonator (FBAR) devices are presented for the first time. The resonance characteristics could be significantly improved due to thermal annealing. FBAR devices with Bragg reflectors annealed at 400°C/30 min show excellent resonance characteristics in terms of return loss and Q-factor.
Keywords :
Q-factor; acoustic resonance; acoustic resonator filters; acoustic resonators; acoustic wave reflection; annealing; bulk acoustic wave devices; losses; silicon compounds; tungsten; zinc compounds; 30 min; 400 degC; Q-factor; W-SiO2; W/SiO2 multilayer Bragg reflectors; ZnO; ZnO-based FBAR devices; bulk acoustic resonator devices; duplexers; filters; resonance characteristics; return loss; thermal annealing;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20030638
