Title :
Plasma parameters of diffusion-controlled microwave discharges in surface-wave fields
Author :
Makasheva, Kremena ; Shivarova, Antonia
Author_Institution :
Fac. of Phys., Sofia Univ., Bulgaria
fDate :
2/1/2002 12:00:00 AM
Abstract :
Results from diagnostics of diffusion-controlled stationary gas discharges maintained in the field of propagating surface waves are presented in this study. The set of the plasma parameters obtained includes: 1) the plasma density n¯, averaged over the discharge cross section; and its axial profile n¯(z);. 2) the electron-neutral elastic collision frequency ν; 3) the parameter μ, which describes the radial profile of the plasma density; 4) the parameter Θ, the power absorbed on average by an electron, and its axial variation Θ (z); 5) the electron temperature Te (z); and 6) the gas temperature Tg. The mechanisms of electron heating and discharge self-consistency are discussed
Keywords :
high-frequency discharges; plasma density; plasma diagnostics; plasma heating; plasma temperature; plasma waves; surface waves (fluid); axial profile; diagnostics; diffusion-controlled microwave discharges; diffusion-controlled stationary gas discharges; discharge cross section; discharge self-consistency; electron heating; electron temperature; electron-neutral elastic collision frequency; gas temperature; plasma density; plasma parameters; propagating surface waves; radial profile; surface-wave fields; Electromagnetic heating; Electrons; Frequency; Microwave propagation; Plasma density; Plasma diagnostics; Plasma temperature; Plasma waves; Surface discharges; Surface waves;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2002.1003885