Metal mask fabrication with an inkjet printer for AWG phase trimming using a photosensitive refractive index change

Author

Takada, Kazumasa ; Takada, Yoshitaka ; Yokota, Akira ; Satoh, Shin-Ichi

Author_Institution

Dept. of Electron. Eng., Gunma Univ., Kiryu, Japan

Volume

17

Issue

4

fYear

2005

fDate

4/1/2005 12:00:00 AM

Firstpage

813

Lastpage

815

Abstract

We report a simple method for fabricating a metal mask with wet etching designed to reduce the adjacent crosstalk of arrayed-waveguide gratings (AWGs) by using a photoinduced refractive index change. This process utilizes a commercially available inkjet printer and a copy machine, and so the resolution of the fabricated window pattern is not very high. However, the fabricated mask enables us to achieve a great reduction in adjacent crosstalk because it depends solely on a slowly varying component in the phase error distribution of an AWG.

Keywords

arrayed waveguide gratings; etching; ink jet printers; integrated optics; masks; optical communication equipment; optical crosstalk; optical design techniques; optical fabrication; refractive index; ultraviolet radiation effects; AWG phase trimming; adjacent crosstalk; arrayed-waveguide gratings; copy machine; inkjet printer; metal mask fabrication; phase error distribution; photosensitive refractive index change; wet etching; Arrayed waveguide gratings; Fabrication; Optical arrays; Optical crosstalk; Optical refraction; Optical waveguides; Phased arrays; Printers; Refractive index; Resists; Crosstalk; gratings; optical arrays; optical planar waveguides; phased array; photosensitive refractive index change;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2004.842788

Filename

1411885