Stochastic Plasma Charging of Nanopatterned Dielectric Surfaces

A 2-D simulation of the plasma bombardment of high aspect ratio dielectric structures is used to demonstrate stochastic charging behavior arising as absolute dimension decreases from 500 to 50 nm. Statistical analyses are then performed after the system has evolved beyond initial charging to indicate the regions of high variability in potential and to provide representative snapshots of mean and extreme potentials within the structure.