• DocumentCode
    756196
  • Title

    Improved drift in two-phase, long-channel, shallow buried-channel CCDs with longitudinally nonuniform storage-gate implants

  • Author

    Lattes, A.L. ; Munroe, S.C. ; Seaver, M.M. ; Murguia, J.E. ; Melngailis, J.

  • Author_Institution
    MIT Lincoln Lab., Lexington, MA, USA
  • Volume
    39
  • Issue
    7
  • fYear
    1992
  • fDate
    7/1/1992 12:00:00 AM
  • Firstpage
    1772
  • Lastpage
    1774
  • Abstract
    Two-phase buried-channel charge-coupled devices (CCDs) with a gradient in the storage wells, generated by a nonuniform channel doping parallel to the surface, were studied at room temperature and at 77 K. The built-in drift fields improve the charge transfer efficiency by more than an order of magnitude, consistently with two-dimensional simulations
  • Keywords
    charge-coupled device circuits; charge-coupled devices; ion implantation; semiconductor device models; simulation; 77 K; built-in drift fields; buried channel CCD; channel doping; charge transfer efficiency; charge-coupled devices; long-channel; longitudinally nonuniform storage-gate implants; modelling; shallow buried-channel; two-dimensional simulations; two-phase; Charge coupled devices; Charge transfer; Clocks; Computer science; Doping; Electrons; Implants; Laboratories; Potential well; Temperature;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/16.141248
  • Filename
    141248