Title :
Millimeter-wave on-wafer waveform and network measurements using active probes
Author :
Yu, Ruai Y. ; Reddy, Madhukar ; Pusl, Joe ; Allen, Scott T. ; Case, Michael ; Rodwell, Mark J.W.
Author_Institution :
Dept. of Electr. & Comput. Eng., California Univ., Santa Barbara, CA, USA
fDate :
4/1/1995 12:00:00 AM
Abstract :
We have fabricated active probes for on-wafer waveform and network measurements. The probes incorporate GaAs nonlinear transmission line (NLTL) based network analyzer (NWA) integrated circuits and low-loss quartz coplanar-waveguide probe tips. The active probes show step response falltimes of 2.7 ps when excited by a 0.7-ps falltime input, Using these active probes, we demonstrate both waveform measurements with 2.7-ps risetime and network measurements to 200 GHz. We discuss the probe tip and NWA IC design, the hybrid assembly and mechanical design, and system design considerations. On-wafer waveform and S-parameter measurements of monolithic millimeter-wave integrated circuits are demonstrated
Keywords :
MIMIC; S-parameters; coplanar waveguides; gallium arsenide; integrated circuit measurement; integrated circuit testing; millimetre wave measurement; network analysers; probes; test equipment; 0.7 ps; 2.7 ps; 200 GHz; EHF; GaAs; GaAs nonlinear transmission line; MIMIC; S-parameter measurements; active probes; coplanar-waveguide probe; hybrid assembly; integrated circuit testing; low-loss quartz CPW probe tips; mechanical design; millimeter-wave onwafer measurements; monolithic millimeter-wave integrated circuits; network analyzer; network measurements; waveform measurements; Circuit analysis; Coplanar transmission lines; Distributed parameter circuits; Gallium arsenide; Hybrid integrated circuits; Integrated circuit measurements; Millimeter wave integrated circuits; Millimeter wave measurements; Probes; Transmission line measurements;
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
