DocumentCode :
757367
Title :
Planar microwave and millimeter-wave lumped elements and coupled-line filters using micro-machining techniques
Author :
Chi, Chen-Yu ; Rebiez, G.M.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
Volume :
43
Issue :
4
fYear :
1995
fDate :
4/1/1995 12:00:00 AM
Firstpage :
730
Lastpage :
738
Abstract :
Planar microwave and millimeter-wave inductors and capacitors have been fabricated on high-resistivity silicon substrates using micro-machining techniques. The inductors and capacitors are suspended on a thin dielectric membrane to reduce the parasitic capacitance to ground. The resonant frequencies of a 1.2 nH and a 1.7-nH inductor have been increased from 22 GHz and 17 GHz to around 70 GHz and 50 GHz, respectively. We also report on the design and measurement of a new class of stripline filters suspended on a thin dielectric membrane. Interdigitated filters with 43% and 5% bandwidth have been fabricated and exhibit a port-to-port 0.7 dB and 2.0 dB loss, respectively, at 14-15 GHz. The micro-machining fabrication technique can be used with silicon and GaAs substrates in microstrip or coplanar-waveguide configurations to result in planar low-loss lumped elements and filters suitable for monolithic integration or surface mount devices up to 100 GHz
Keywords :
MMIC; capacitors; coplanar waveguides; gallium arsenide; inductors; lumped parameter networks; membranes; micromachining; microstrip filters; microwave filters; millimetre wave filters; passive filters; silicon; strip line filters; 0.7 dB; 14 to 100 GHz; 2 dB; EHF; GaAs; MMIC compatible fabrication; SHF; Si; capacitors; coplanar-waveguide; coupled-line filters; high-resistivity Si substrates; inductors; interdigitated filters; lumped elements type; micromachining techniques; microstrip type; millimeter-wave filters; monolithic integration; parasitic capacitance; planar components; stripline filters; surface mount devices; thin dielectric membrane; Biomembranes; Capacitors; Dielectric substrates; Filters; Inductors; Microwave theory and techniques; Millimeter wave technology; Parasitic capacitance; Resonant frequency; Silicon;
fLanguage :
English
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9480
Type :
jour
DOI :
10.1109/22.375218
Filename :
375218
Link To Document :
بازگشت