Title :
Editorial Special Section on the 2013 SEMI Advanced Semiconductor Manufacturing Conference
Author :
Werbaneth, Paul ; Braggin, Jennifer ; Radloff, Stefan ; Weber, Charles
Author_Institution :
, Independent Consultant
Abstract :
The papers in this special section were presented at the 2013 Advanced Semiconductor Conference (ASMC).
Keywords :
Data mining; Meetings; Semiconductor device manufacture; Semiconductor devices; Special issues and sections; Wafer scale integration;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2014.2338391
