Title :
Proton Radiation Effects on MEMS Silicon Strain Gauges
Author :
Marinaro, Damian G. ; McMahon, Phillip ; Wilson, Alan
Author_Institution :
Defence Sci. & Technol. Organ., Port Melbourne, VIC
fDate :
6/1/2008 12:00:00 AM
Abstract :
A microelectromechanical system (MEMS) strain gauge constructed from single-crystalline silicon has been developed for application in aircraft structural-health-monitoring. The effects of proton irradiation on the piezoresistive elements of the silicon strain gauges are examined. Degradation in the piezoresistive response at applied strains above 2000 microstrain is observed.
Keywords :
aircraft; condition monitoring; micromechanical devices; piezoresistance; proton effects; silicon; strain gauges; structural engineering; MEMS silicon strain gauges; Si; aircraft structural-health-monitoring; piezoresistive elements; proton radiation effects; single-crystalline silicon; Aerospace electronics; Aircraft manufacture; Capacitive sensors; Ionizing radiation; Micromechanical devices; Piezoresistance; Piezoresistive devices; Proton radiation effects; Radiation effects; Silicon; Micromechanical devices; piezoresistive devices; radiation effects;
Journal_Title :
Nuclear Science, IEEE Transactions on
DOI :
10.1109/TNS.2008.921933
