Title :
Fabrication of ultralow-profile micromachined inductor with magnetic core material
Author :
Gao, Xiao-Yu ; Zhou, Yong ; Ding, Wen ; Cao, Ying ; Lei, Chong ; Chen, Ji-an ; Zhao, Xiao-Lin
Author_Institution :
Nat. Key Lab. of Nano/Micro Fabrication Technol., Shanghai Jiao Tong Univ., China
Abstract :
We have fabricated a microinductor with an ultralow profile by a microelectromechanical systems (MEMS) technique. The fabrication process uses UV-LIGA, dry etching, fine polishing, and electroplating to achieve high performance. The dimensions of the inductor are 1500 μm×900 μm×100 μm. It has 41 turns, with coil width of 20 μm, space of 20 μm, and a high aspect ratio of 5 : 1. The inductance is 0.424 μH and the quality factor (Q factor) is about 1.7 at a frequency of 1 MHz. The stray capacitance is approximately zero over the frequency range measured.
Keywords :
LIGA; Q-factor; etching; inductors; magnetic cores; micromachining; micromechanical devices; polishing; 1 MHz; 20 micron; UV-LIGA; dry etching; electroplating; fine polishing; magnetic core material; microelectromechanical systems; microinductor; micromachined inductor; quality factor; stray capacitance; Coils; Dry etching; Fabrication; Frequency; Inductors; Magnetic cores; Magnetic materials; Microelectromechanical systems; Micromechanical devices; Q factor; Inductance; magnetic cores; microelectromechanical systems (MEMS); microinductors; quality factor;
Journal_Title :
Magnetics, IEEE Transactions on
DOI :
10.1109/TMAG.2005.858440
