DocumentCode
760381
Title
Regional observability of a thermal process
Author
Jai, A. El ; Zerrik, E. ; Simon, M.C. ; Amouroux, M.
Author_Institution
Perpignan Univ., France
Volume
40
Issue
3
fYear
1995
fDate
3/1/1995 12:00:00 AM
Firstpage
518
Lastpage
521
Abstract
The realization of a ceramic protector covering the subregion of a substrate and using chemical vapor deposition techniques needs the temperature field in the deposition zone to be controlled. A feedback control of this temperature is based on the knowledge of the temperature in the considered subregion. The difficulty occurs because measurements can only be obtained out of the deposition zone. The purpose of this paper is to give an original approach for the reconstruction of the state in the deposition subregion
Keywords
chemical technology; chemical vapour deposition; feedback; observability; process control; substrates; ceramic protector; chemical vapor deposition; deposition subregion; observability; process control; substrate; thermal process; Ceramics; Chemical vapor deposition; Equations; Feedback control; Mechanical factors; Observability; Protection; Temperature control; Temperature dependence; Time measurement;
fLanguage
English
Journal_Title
Automatic Control, IEEE Transactions on
Publisher
ieee
ISSN
0018-9286
Type
jour
DOI
10.1109/9.376073
Filename
376073
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