• DocumentCode
    764203
  • Title

    CMOS-compatible optical rib waveguides defined by local oxidation of silicon

  • Author

    Rowe, L.K. ; Elsey, M. ; Tarr, N.G. ; Knights, A.P. ; Post, E.

  • Author_Institution
    Dept. of Electron., Carleton Univ., Ont.
  • Volume
    43
  • Issue
    7
  • fYear
    2007
  • Firstpage
    392
  • Lastpage
    393
  • Abstract
    The local oxidation of silicon process is shown to be an effective means of defining optical rib waveguides in silicon on insulator while maintaining the surface planarity required for CMOS integration. Experimental waveguides have shown singlemode operation and losses of less than 1 dB/cm in the telecommunications band around 1550 nm
  • Keywords
    CMOS integrated circuits; optical waveguides; rib waveguides; silicon-on-insulator; CMOS integration; local oxidation; optical rib waveguides; silicon on insulator; single mode operation; surface planarity;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:20073680
  • Filename
    4145293
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=764203