DocumentCode
764482
Title
Non-contact high resolution microwave scanning measurement technology
Author
Berger, N. ; Sulzbach, T. ; Kantor, R. ; Shvets, I.V. ; Landstorfer, F.M.
Author_Institution
Inst. fur Hochfrequenztech., Univ. of Stuttgart, Germany
Volume
39
Issue
14
fYear
2003
fDate
7/10/2003 12:00:00 AM
Firstpage
1047
Lastpage
1048
Abstract
For non-contact inspection of microwave integrated and hybrid circuits a technical concept and realisation of a high resolution scanning technique for the detection of the electric field distribution has been developed. The near-field signal is measured in magnitude and phase allowing the calculation of the signal flow in the device under test.
Keywords
inspection; integrated circuit measurement; integrated circuit testing; microwave integrated circuits; microwave measurement; device under test; electric field distribution; hybrid circuits; microwave integrated circuits; microwave scanning measurement technology; near-field signal; noncontact inspection; signal flow;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:20030705
Filename
1220807
Link To Document