AlN film SAW resonator integrated with metal structure

Author

Lin Shu ; Jianying Jiang ; Bin Peng ; Yu Wang ; Xingzhao Liu

Author_Institution

Univ. of Electron. Sci. & Technol. of China, Chengdu, China

Volume

51

Issue

5

fYear

2015

fDate

3 5 2015

Firstpage

379

Lastpage

380

Abstract

A novel surface acoustic wave (SAW) resonator integrated on a metal substrate is presented. The devices were fabricated on the aluminium nitride (AlN) thin films deposited by mid-frequency magnetron sputtering on polished TC4 titanium alloy substrates. Using a two-step growth method, AlN film with a full-width at half-maximum of 4.1° had been prepared. The AlN film SAW resonator shows a resonance frequency of 129 MHz and an electromechanical coupling coefficient of 0.28%. The measurement results agree well with the simulation results. This integrated SAW resonator can be used as a good strain sensor in metal structure health monitoring.

Keywords

aluminium compounds; sputter deposition; surface acoustic wave resonators; thin film devices; titanium alloys; wide band gap semiconductors; AlN; TC4 titanium alloy substrates; aluminium nitride thin films; electromechanical coupling coefficient; frequency 129 MHz; integrated SAW resonator; metal structure health monitoring; metal substrate; midfrequency magnetron sputtering; resonance frequency; strain sensor; surface acoustic wave resonator;

fLanguage

English

Journal_Title

Electronics Letters

Publisher

iet

ISSN

0013-5194

Type

jour

DOI

10.1049/el.2014.3495

Filename

7047366