Development of a Linear Micro-Inductosyn Sensor

This paper describes the development of an inductive microposition measuring system based on the "Inductosyn" principle and its fabrication using thin-film technology. By integrating a soft magnetic flux guide, the coupling between excitation and sensing coils was increased. The system consists of two principle components: a stationary planar meander coil and two planar meander coils positioned on a slider. The sensor device was simulated by applying the finite-element method. Thin-film processes were used to fabricate an inductive microposition measuring system. Initial measurements show an induced voltage of 9 mV at an excitation current of 40 mA and a frequency of 5 MHz