DocumentCode
766460
Title
Properties of Compositionally Modulated Magnetic Films
Author
Okuno, H. ; Sakaki, Y. ; Sakurai, Y.
Author_Institution
Chiba Univ., Faculty of Engng., Chiba
Volume
1
Issue
7
fYear
1985
Firstpage
831
Lastpage
833
Abstract
Compositionally modulated Gd + Co, Fe70 Co30 + SiO2 , and Fe + SiO2 films by magnetron RF sputtering were prepared, and the composition depth profiles, electrical and magnetic properties measured. The substrate was rotated during film growth, and the rotation rate converted into an equivalent film deposition time T. Compositional modulation of Gd + Co film down to a period of about 120 Ã
was confirmed. Short times T resulted in amorphous films of uniform composition in the depth direction, while longer T yielded crystalline film with a sinusoidal demodulated composition profile. The Hc of such film was decreased to 1/10, suggesting a means for obtaining soft magnetic properties.
Keywords
Amorphous magnetic materials; Electric variables measurement; Iron; Magnetic films; Magnetic modulators; Magnetic properties; Radio frequency; Soft magnetic materials; Sputtering; Substrates;
fLanguage
English
Journal_Title
Magnetics in Japan, IEEE Translation Journal on
Publisher
ieee
ISSN
0882-4959
Type
jour
DOI
10.1109/TJMJ.1985.4548980
Filename
4548980
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