A seat microvalve nozzle for optimal gas-flow capacity at large-controlled pressure

Author

Van Der Wijngaart, Wouter ; Thorsén, Anders ; Stemme, Göran

Author_Institution

Dept. of Signals, R. Inst. of Technol., Stockholm, Sweden

Volume

14

Issue

2

fYear

2005

fDate

4/1/2005 12:00:00 AM

Firstpage

200

Lastpage

206

Abstract

Seat microvalves are the most common microvalve type for gas-flow control. This paper presents a general method for optimizing the flow capacity of a seat valve nozzle and diminishing the requirements on the valve actuator´s stroke length. Geometrical analysis and finite element (FE) simulations show that for controlling large gas flow at elevated pressure, the optimal nozzle design in terms of flow capacity for a given actuator performance is a multiple-orifice arrangement with miniaturized circular nozzles. Experimental results support the design introduced in this paper.

Keywords

finite element analysis; flow control; flow simulation; microvalves; nozzles; optimisation; finite element simulation; flow capacity optimization; flow optimization; flow simulation; gas-flow control; geometrical analysis; large-controlled pressure; miniaturized circular nozzles; multiple-orifice arrangement; optimal gas-flow capacity; seat microvalve nozzle; seat valve nozzle; valve actuator stroke length; Analytical models; Finite element methods; Fluid flow; Microvalves; Optimal control; Optimization methods; Performance analysis; Pressure control; Solid modeling; Valves; Flow optimization; flow simulation; microvalve; nozzle;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2004.839018

Filename

1416896