Title :
Hybrid-mounted micromachined aluminum hotwires for wall shear-stress measurements
Author :
Haasl, Sjoerd ; Mucha, Dirk ; Chernoray, Valery ; Ebefors, Thorbjörn ; Enoksson, Peter ; Löfdahl, Lennart ; Stemme, Göran
Author_Institution :
Microsystem Technol. Group, R. Inst. of Technol., Stockholm, Sweden
fDate :
4/1/2005 12:00:00 AM
Abstract :
In this paper, we present a micromachined metal hotwire anemometer sensor for use in wall shear-stress measurements. We describe its design and fabrication. A novel hybrid assembly method has been developed to make it possible to measure close to the surface without contacting leads interfering with the flow. Experimental results illustrate the behavior and characteristics of this sensor.
Keywords :
anemometers; boundary layers; flow measurement; microassembling; micromachining; microsensors; stress measurement; Al; anemometer sensor; hybrid assembly method; hybrid mounting; microassembly; micromachined aluminum hotwires; micromachined metal hotwire; microsensors; wall shear stress measurement flow; Aluminum; Assembly; Electric variables measurement; Fluid flow measurement; Interference; Sensor phenomena and characterization; Sensor systems; Stress; Thermal sensors; Velocity measurement; Aluminum; anemometers; assembly; hotwire; microassembly; microsensors; wall shear stress;
Journal_Title :
Microelectromechanical Systems, Journal of
DOI :
10.1109/JMEMS.2004.839029
