Frequency-Dependent Electrical and Thermal Response of Heated Atomic Force Microscope Cantilevers

Author

Park, Keunhan ; Lee, Jungchul ; Zhang, Zhuomin M. ; King, William P.

Author_Institution

George W. Woodruff Sch. of Mech. Eng., Georgia Inst. of Technol., Atlanta, GA

Volume

16

Issue

2

fYear

2007

fDate

4/1/2007 12:00:00 AM

Firstpage

213

Lastpage

222

Abstract

This paper investigates the electrical and thermal response of the heated atomic force microscope (AFM) cantilevers in the frequency range from 10 Hz to 1 MHz. Spectrum analysis of the cantilever voltage response to periodic heating distinguishes different thermal behaviors of the cantilever in the frequency domain: the cantilever voltage at low frequencies is modulated by higher-order harmonics, and at high frequencies it oscillates with 1-omega only. A simple model facilitates the understanding of complicated electrical and thermal behaviors in the cantilever, thus, it is possible to determine the cantilever temperature. The calculation predicts that temperature oscillation is restricted to the heater region when the cantilever is operated at about 10 kHz, suggesting that the periodic-heating operation of the cantilever may be employed for highly sensitive thermal metrology

Keywords

Raman spectroscopy; atomic force microscopy; cantilevers; frequency response; 10 to 1E6 Hz; Raman spectroscopy; atomic force microscope cantilevers; frequency response; spectrum analysis; temperature oscillation; thermal response; Atomic force microscopy; Frequency; Memory; Metrology; Noise measurement; Noise reduction; Resistance heating; Temperature sensors; Thermal force; Thermomechanical processes; Atomic force microscopy (AFM); Raman spectroscopy; electric variables measurement; frequency response;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2006.889498

Filename

4147596