Slit Design Consideration on the Ferromagnetic RF Integrated Inductor

Author

Yamaguchi, Masahiro ; Yamada, Keiju ; Kim, Ki Hyeon

Author_Institution

Graduate Sch. of Eng., Tohoku Univ.

Volume

42

Issue

10

fYear

2006

Firstpage

3341

Lastpage

3343

Abstract

Five types of RF integrated spiral inductors were microfabricated and applied for the discussion of local anisotropy field distribution in the film and the local current distribution in the coil cross section, which strongly influences the frequency profile of the complex permeability, ferromagnetic resonance (FMR) frequency and inductance-capacitance (LC) resonance frequency. The shifted type inductor exhibited as high quality factor as 20.7 at 1.9 GHz because the local FMR frequency is the highest and the current distribution is most uniform among the test inductors

Keywords

current distribution; ferromagnetic resonance; inductors; magnetic anisotropy; magnetic permeability; magnetic thin film devices; microwave devices; 1.9 GHz; anisotropy field distribution; coil cross section; current distribution; electromagnetic field simulation; ferromagnetic inductor; ferromagnetic resonance frequency; inductance-capacitance resonance frequency; integrated spiral inductors; permeability; quality factor; radiofrequency inductor; Anisotropic magnetoresistance; Coils; Current distribution; Inductors; Magnetic resonance; Permeability; Q factor; Radio frequency; Resonant frequency; Spirals; Complex permeability; RF integrated inductor; electromagnetic field simulation; ferromagnetic resonance (FMR) frequency; quality factor;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2006.879636

Filename

1704620