DocumentCode
767514
Title
Absolute measurement of the density of silicon crystals in vacuo for a determination of the Avogadro constant
Author
Fujii, K. ; Tanaka, M. ; Nezu, Y. ; Sakuma, A. ; Leistner, A. ; Giardini, W.
Author_Institution
Nat. Res. Lab. of Metrol., Ibaraki, Japan
Volume
44
Issue
2
fYear
1995
fDate
4/1/1995 12:00:00 AM
Firstpage
542
Lastpage
545
Abstract
An absolute measurement of the density of silicon crystals used for a determination of Avogadro constant is described. Two 1-kg spheres of nearly perfect geometries were fabricated from a single-crystal silicon ingot both for measuring their densities and for determining the density distribution in the ingot. A scanning type optical interferometer was used to measure their diameters in vacuo. Their volumes were obtained by fitting the diameters to a series of spherical harmonics. Thickness of oxide layers on their surfaces was measured by using an ellipsometer to evaluate its effect on their volumes. The masses of the spheres were measured by using a precision balance for the prototype kilogram. The relative total uncertainty of the densities, determined by direct measurements of their masses and volumes in vacuo, is estimated to 1.1×10-7
Keywords
balances; constants; density measurement; diameter measurement; light interferometers; mass measurement; silicon; thickness measurement; volume measurement; weighing; Avogadro constant; Si; Si crystals; absolute measurement; density; density distribution; direct measurements; ellipsometer; ingot; oxide layers; precision balance; prototype kilogram; relative total uncertainty; scanning type optical interferometer; spherical harmonics; thickness; Crystals; Density measurement; Laboratories; Optical interferometry; Performance evaluation; Prototypes; Silicon; Surface fitting; Thickness measurement; Volume measurement;
fLanguage
English
Journal_Title
Instrumentation and Measurement, IEEE Transactions on
Publisher
ieee
ISSN
0018-9456
Type
jour
DOI
10.1109/19.377902
Filename
377902
Link To Document