Characteristics of (101~0) and (112~0) textured ZnO piezofilms for a shear mode resonator in the VHF-UHF frequency ranges

Author

Yanagitani, Takahiko ; Nohara, Takuya ; Matsukawa, Mami ; Watanabe, Yoshiaki ; Otani, Takahiko

Author_Institution

Fac. of Eng., Doshisha Univ., Kyoto, Japan

Volume

52

Issue

11

fYear

2005

Firstpage

2140

Lastpage

2145

Abstract

This paper reports the fabrication and characterization of ZnO piezoelectric thin films in which the crystallite c-axis is unidirectionally aligned in the plane. The films were deposited by a conventional radio frequency (RF) magnetron sputtering apparatus without epitaxy. We have measured reflection coefficient S/sub 11/ of the ZnO film/glass substrate composite shear mode resonator and confirmed that the resonator excites shear wave only in the very high frequency to ultra high frequency ranges (VHF-UHF). The crystallites c-axis orientation and alignment were determined by X-ray diffraction (XRD) patterns, /spl phi/-scan pole figure analysis, /spl omega/-scan rocking curves, and atomic force microscope (AFM) measurement. The transduction of the shear wave showed good agreement with properties of the crystallite alignment in the film.

Keywords

II-VI semiconductors; X-ray diffraction; acoustic wave effects; atomic force microscopy; high-frequency effects; piezoelectric semiconductors; piezoelectric thin films; sputter deposition; zinc compounds; (101~0) textured piezofilms; (112~0) textured piezofilms; /spl omega/-scan rocking curves; /spl phi/-scan pole figure analysis; AFM; SiO/sub 2/; VHF-UHF frequency ranges; X-ray diffraction; XRD; ZnO; atomic force microscope; crystallite c-axis; piezoelectric thin films; radio frequency magnetron sputtering; reflection coefficient; shear mode resonator; transduction; Atomic force microscopy; Atomic measurements; Crystallization; Fabrication; Force measurement; Optical films; Piezoelectric films; Radio frequency; Sputtering; Zinc oxide; Ceramics; Computer Simulation; Equipment Design; Equipment Failure Analysis; Membranes, Artificial; Models, Theoretical; Radio Waves; Reproducibility of Results; Sensitivity and Specificity; Shear Strength; Stress, Mechanical; Transducers; Ultrasonography; Zinc Oxide;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/TUFFC.2005.1561685

Filename

1561685