Fe/Cu Multilayered Thin Films by RF-Magnetron Sputtering Method

This paper reports on research into the relationship between structure and magnetic properties of Fe/Cu multilayered films grown by the sputtering method in which the Fe and Cu in the system did not have a tendency to form solid solutions with respect to one another. Auger electron spectroscopy analysis and transmission electron microscopy observation showed that these films were periodic multilayered structures. As the thickness of a single layer decreased, the coercivity decreased, and single-axis anistropy in the plane was observed clearly.