Structures and Material Characteristics of Magneto-Optical Disks

The effect of different methods of applying SiO protective layers to magneto-optical disks are discussed. These layers were applied using resistance heating (RH) evaporation, electron beam (EB) evaporation and sputtering. Compositional disparity was observed between the applied films and their sources for each of the different application methods. This disparity was largest with sputtering and smallest with RH evaporation. The aging of the Kerr rotation angle of magneto-optical disks with SiO protective layers also showed a similar correspondence. The continuous production of films with SiO protective layers in a vacuum lowered deterioration levels and inhibited pitting corrosion.