Co-Cr Perpendicular Anisotropy Film Deposited by Evaporation with Ion Bombardment

Changes in CoCr films induced by argon ion bombardment during film deposition by evaporation were studied. The film magnetic properties and X-ray rocking curve widths indicated that ion bombardment during deposition results in greater film uniformity, with larger crystal grains, better crystal orientation and less Cr segregation. This is probably because ion bombardment promotes atomic diffusion in films, thereby reducing grain boundaries and other lattice defects.