DocumentCode
772417
Title
An analytical model for flat-band polysilicon quantization in MOS devices
Author
Spinelli, Alessandro S. ; Clerc, Raphael ; Ghibaudo, Gerard
Volume
49
Issue
7
fYear
2002
fDate
7/1/2002 12:00:00 AM
Firstpage
1314
Lastpage
1316
Abstract
A simple, physically based analytical model for carrier quantization at flat bands is presented and applied to the case of gate polysilicon quantization. Results for the reduction in the gate capacitance and threshold voltage shift are in good agreement with numerical simulations
Keywords
MOSFET; capacitance; elemental semiconductors; quantisation (quantum theory); semiconductor device models; silicon; MOS devices; Si; analytical model; carrier quantization; flat-band polysilicon quantization; gate capacitance; numerical simulations; short-channel effects; threshold voltage shift; Analytical models; Capacitance; Carrier confinement; Doping; MOS devices; Numerical simulation; Physics; Quantization; Substrates; Threshold voltage;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/TED.2002.1013293
Filename
1013293
Link To Document