Fabrication of PRTs and analysis of characteristics

Platinum thin films have been prepared on Al₂O₃ substrates by DC magnetron sputtering. Platinum resistance thermometers have been fabricated and their characteristics analysed. We used a UV laser (wavelength 355 nm) to adjust the Pt thin films temperature sensors to 100 Ω at 0°C. As result of setting the Pt resistors to the target value of 109.73 Ω at 25°C, 82.3% of total resistors had a tolerance within ±0.03 Ω and 17.7% were within ±0.06 Ω of A-class tolerance according to DIN EN 60751. The PRTs which were fabricated in this research had excellent characteristics such as high accuracy, long-term stability, wide temperature range, good linearity, good repeatability and rapid response time.