• DocumentCode
    775292
  • Title

    Dendritic platinum aggregates produced in the plasma assisted chemical vapor deposition of tin oxide thin films

  • Author

    Pulpytel, Jerome ; Etienne, Camille Petit ; Arefi-Khonsari, Farzanneh

  • Author_Institution
    Lab. de Gemie des Procedes Plasmas et Traitements de Surface, Paris, France
  • Volume
    33
  • Issue
    2
  • fYear
    2005
  • fDate
    4/1/2005 12:00:00 AM
  • Firstpage
    244
  • Lastpage
    245
  • Abstract
    The formation of platinum fractal-like structures obtained by the decomposition of platinum acetylacetonate entrapped in the plasma assisted chemical vapor deposition (PACVD) of tin oxide thin films is shown. The platinum aggregates, thus formed, show a dendritic structure of fractal dimension D≈1.1-1.6, depending on the experimental conditions.
  • Keywords
    aggregates (materials); decomposition; dendrites; dendritic structure; fractals; plasma CVD; platinum; thin films; tin compounds; SnO2:Pt; decomposition; dendritic platinum aggregates; plasma assisted chemical vapor deposition; platinum acetylacetonate; platinum fractal-like structures; tin oxide thin films; Aggregates; Chemical vapor deposition; Electrodes; Fractals; Plasma chemistry; Platinum; Radio frequency; Sputtering; Surface morphology; Tin; Gas sensors; PACVD; platinum dendrites; tin oxide;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2005.845337
  • Filename
    1420418
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=775292