• DocumentCode
    775501
  • Title

    Dynamics of E-H mode transition in high-pressure RF inductively coupled plasmas

  • Author

    Razzak, M. Abdur ; Takamura, Shuichi ; Uesugi, Yoshihiko

  • Author_Institution
    Dept. of Energy Eng. & Sci., Nagoya Univ., Japan
  • Volume
    33
  • Issue
    2
  • fYear
    2005
  • fDate
    4/1/2005 12:00:00 AM
  • Firstpage
    284
  • Lastpage
    285
  • Abstract
    Capacitive (E) to inductive (H) mode transition dynamics in radio frequency (RF) argon inductively coupled plasmas (ICPs) with up to atmospheric pressure is studied experimentally. High-speed imaging (13500 fps) is performed to investigate the transition dynamics, and to estimate the characteristic time scale of E-H mode transition. The effect of diatomic gas inclusion (here N2) on the E-H mode transition dynamics is also discussed.
  • Keywords
    argon; high-frequency discharges; high-speed optical techniques; plasma diagnostics; plasma instability; Ar; argon; atmospheric pressure; capacitive-inductive mode transition; characteristic time scale; diatomic gas inclusion; high-pressure RF inductively coupled plasmas; high-speed imaging; Argon; Atmospheric-pressure plasmas; Electrons; Ignition; Ionization; Plasma diagnostics; Plasma properties; Plasma sources; Power engineering and energy; Radio frequency; high-speed imaging; inductively coupled plasma;
  • fLanguage
    English
  • Journal_Title
    Plasma Science, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0093-3813
  • Type

    jour

  • DOI
    10.1109/TPS.2005.845019
  • Filename
    1420438
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=775501