DocumentCode
775908
Title
Double sheaths in RF discharges
Author
Marques, Luís ; Gousset, Gérard ; Alves, Luís L.
Author_Institution
Centro de Fisica de Plasmas, Inst. Superior Tecnico, Lisbon, Portugal
Volume
33
Issue
2
fYear
2005
fDate
4/1/2005 12:00:00 AM
Firstpage
358
Lastpage
359
Abstract
This paper analyzes the formation of double space-charge sheaths, associated with the development of double ionization structures in radio frequency discharges. A simulation tool is used to generate space-time images of the ionization rate in hydrogen and in helium, obtained by inducing artificial modifications in the mobility of charged particles, with these gases.
Keywords
helium; high-frequency discharges; hydrogen; ionisation; plasma sheaths; plasma simulation; space charge; H; He; charged particle mobility; double ionization structures; double space-charge sheaths; helium; hydrogen; radio frequency discharges; simulation; space-time images; Electrodes; Electron mobility; Gases; Helium; Hydrogen; Image generation; Ionization; Plasma confinement; Plasma sheaths; Radio frequency; Discharge modeling; field inversion; helium; hydrogen; plasma sheaths; radio frequency (RF) discharges;
fLanguage
English
Journal_Title
Plasma Science, IEEE Transactions on
Publisher
ieee
ISSN
0093-3813
Type
jour
DOI
10.1109/TPS.2005.845130
Filename
1420475
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