Title :
Imaging of unbalanced magnetron DC discharge
Author :
Kvasnica, Samuel ; Adámek, Petr ; Spatenka, P.
Author_Institution :
Univ. of Technol. Vienna, Austria
fDate :
4/1/2005 12:00:00 AM
Abstract :
We present the framework used to obtain a comprehensive set of data on discharge of unbalanced magnetrons by means of Langmuir-probe diagnostics and the resulting images of the internal plasma parameters.
Keywords :
Langmuir probes; high-frequency discharges; plasma density; plasma sheaths; plasma sources; plasma temperature; plasma transport processes; sputter deposition; Langmuir-probe diagnostics; internal plasma parameters; plasma imaging; unbalanced magnetron DC discharge; Fault location; Magnetosphere; Magnetostatics; Plasma applications; Plasma density; Plasma simulation; Plasma sources; Plasma temperature; Plasma transport processes; Probes; Hot energy tail; Langmuir-probe diagnostics; plasma imaging; presheath; unbalanced magnetron;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2005.845375
