• DocumentCode
    776982
  • Title

    Wafer level testing for semiconductor laser manufacture via spatially resolved photoluminescence

  • Author

    Carver, Gary E. ; Heebner, Richard W. ; Astfalk, Greg

  • Author_Institution
    AT&T Bell Labs., Princeton, NJ, USA
  • Volume
    1
  • Issue
    4
  • fYear
    1995
  • fDate
    12/1/1995 12:00:00 AM
  • Firstpage
    980
  • Lastpage
    986
  • Abstract
    High bandwidth telecommunications depends on the efficient manufacture of semiconductor lasers. The quality of partially processed laser structures can be monitored at the wafer level by spatially resolved photoluminescence (SRPL), providing timely feedback to processing engineers. The same testing procedure can also be applied at the chip level. This allows comparisons of wafer level material quality, chip level material quality, and chip performance
  • Keywords
    photoluminescence; semiconductor device testing; semiconductor lasers; chip level; chip performance; partially processed laser structures; quality; semiconductor laser manufacture; spatially resolved photoluminescence; testing procedure; wafer level; wafer level testing; Bandwidth; Laser feedback; Monitoring; Optical materials; Photoluminescence; Semiconductor device manufacture; Semiconductor device testing; Semiconductor lasers; Semiconductor materials; Spatial resolution;
  • fLanguage
    English
  • Journal_Title
    Selected Topics in Quantum Electronics, IEEE Journal of
  • Publisher
    ieee
  • ISSN
    1077-260X
  • Type

    jour

  • DOI
    10.1109/2944.488395
  • Filename
    488395