DocumentCode
776982
Title
Wafer level testing for semiconductor laser manufacture via spatially resolved photoluminescence
Author
Carver, Gary E. ; Heebner, Richard W. ; Astfalk, Greg
Author_Institution
AT&T Bell Labs., Princeton, NJ, USA
Volume
1
Issue
4
fYear
1995
fDate
12/1/1995 12:00:00 AM
Firstpage
980
Lastpage
986
Abstract
High bandwidth telecommunications depends on the efficient manufacture of semiconductor lasers. The quality of partially processed laser structures can be monitored at the wafer level by spatially resolved photoluminescence (SRPL), providing timely feedback to processing engineers. The same testing procedure can also be applied at the chip level. This allows comparisons of wafer level material quality, chip level material quality, and chip performance
Keywords
photoluminescence; semiconductor device testing; semiconductor lasers; chip level; chip performance; partially processed laser structures; quality; semiconductor laser manufacture; spatially resolved photoluminescence; testing procedure; wafer level; wafer level testing; Bandwidth; Laser feedback; Monitoring; Optical materials; Photoluminescence; Semiconductor device manufacture; Semiconductor device testing; Semiconductor lasers; Semiconductor materials; Spatial resolution;
fLanguage
English
Journal_Title
Selected Topics in Quantum Electronics, IEEE Journal of
Publisher
ieee
ISSN
1077-260X
Type
jour
DOI
10.1109/2944.488395
Filename
488395
Link To Document