Monolithic above-IC resonator technology for integrated architectures in mobile and wireless communication

Author

Dubois, Marc-Alexandre ; Carpentier, Jean-François ; Vincent, Pierre ; Billard, Christophe ; Parat, Guy ; Muller, Claude ; Ancey, Pascal ; Conti, Patrick

Author_Institution

Swiss Center for Electron. & Microtechnol., Neuchatel, Switzerland

Volume

41

Issue

1

fYear

2006

Firstpage

7

Lastpage

16

Abstract

This paper demonstrates the feasibility of an above-IC bulk acoustic wave technology for wireless applications. A double-lattice bulk acoustic wave (BAW) filter with balanced input and output has been designed and integrated as a post-process directly above 0.25 μm BiCMOS wafers comprising RF circuits. This filter, featuring moderate insertion loss of -3dB and extreme out-of-band rejection (>-50 dB) is used in a simplified RF front-end receiver for the WCDMA standard, as well as in a new type of filtering LNA comprising two broadband amplifiers and one BAW filter.

Keywords

bulk acoustic wave devices; crystal resonators; mobile communication; -3 dB; BiCMOS wafers; RF circuits; RF front-end receiver; WCDMA standard; broadband amplifiers; bulk acoustic wave devices; bulk acoustic wave filter; bulk acoustic wave technology; integrated circuit fabrication; micromachining; mobile communication; monolithic above IC resonator technology; piezoelectric resonator filters; portable radio communication; radio receivers; wireless communication; Acoustic waves; BiCMOS integrated circuits; Broadband amplifiers; Filtering; Insertion loss; Integrated circuit technology; Multiaccess communication; Radio frequency; Resonator filters; Wireless communication; Bulk acoustic wave devices; integrated circuit fabrication; micromachining; piezoelectric resonator filters; portable radio communication; radio receivers;

fLanguage

English

Journal_Title

Solid-State Circuits, IEEE Journal of

Publisher

ieee

ISSN

0018-9200

Type

jour

DOI

10.1109/JSSC.2005.858627

Filename

1564340