DocumentCode :
777881
Title :
Electron spin resonance analysis of EP center interactions with H 2: evidence for a localized EP center structure
Author :
Conley, John F., Jr. ; Lenahan, Patrick M.
Author_Institution :
Dept. of Eng. Sci. & Mech., Pennsylvania State Univ., University Park, PA, USA
Volume :
42
Issue :
6
fYear :
1995
fDate :
12/1/1995 12:00:00 AM
Firstpage :
1740
Lastpage :
1743
Abstract :
We report the first observation of a hydrogen complexed EP (E´δ) center. Analysis of EP/H and E´γ/H electron spin resonance spectra show that they have quite similar doublet splitting, doubler linewidth, and doublet g-shift from the center line, providing the first evidence that EP (E´δ) centers do not have a delocalized structure
Keywords :
EPR line breadth; SIMOX; hole traps; hydrogen; silicon; silicon compounds; EP center interactions; H2; SIMOX buried oxides; Si-SiO2; delocalized structure; doubler linewidth; doublet g-shift; doublet splitting; electron spin resonance analysis; hole traps; localized EP center structure; Amorphous materials; Charge carrier processes; Electron traps; Hydrogen; Paramagnetic resonance; Protons; Semiconductor thin films; Silicon; Temperature; Transistors;
fLanguage :
English
Journal_Title :
Nuclear Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9499
Type :
jour
DOI :
10.1109/23.488773
Filename :
488773
Link To Document :
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