Development of integral passive components for multilayer organic MCMs at millimeter wave frequencies

Author

Pham, Anh-Vu H. ; Krishnamurthy, Vikram ; Bates, D. ; Marcinkewicz, W. ; Schmanski, B. ; Saia, R. ; Sprinceanu, L.

Author_Institution

Dept. of Electr. & Comput. Eng., Clemson Univ., SC, USA

Volume

25

Issue

1

fYear

2002

fDate

2/1/2002 12:00:00 AM

Firstpage

98

Lastpage

101

Abstract

We present the design and development of Ta₂N thin-film resistors for the multilayer organic multichip module (MCM) at microwave and millimeter wave frequencies. The Ta₂N thin-film resistors are integrated directly onto multilayer Kapton films and achieve a resistivity of 12.5 Ω/sq. to 25 Ω/sq. Several Ta₂N thin-film resistor structures have been fabricated and electrically characterized up to 50 GHz to develop design rules for this process. For the first time, an ultra-wide band terminator has been developed and integrated on Kapton flex using Ta₂N thin-film resistors. The measured results of this circuit demonstrate a return loss of less than 20-dB over a 50-GHz bandwidth

Keywords

integrated circuit packaging; millimetre wave integrated circuits; molecular electronics; multichip modules; tantalum compounds; thin film resistors; 20 dB; 50 GHz; Kapton flex; Ta₂N; Ta₂N thin-film resistors; design rules; direct integration; integral passive components; millimeter wave frequencies; multilayer Kapton films; multilayer organic multichip module; resistivity; return loss; ultra-wide band terminator; Bandwidth; Conductivity; Frequency; Integrated circuit measurements; Loss measurement; Multichip modules; Nonhomogeneous media; Resistors; Thin film circuits; Transistors;

fLanguage

English

Journal_Title

Advanced Packaging, IEEE Transactions on

Publisher

ieee

ISSN

1521-3323

Type

jour

DOI

10.1109/TADVP.2002.1017691

Filename

1017691