Title :
Integration of a single vertical-cavity surface emitting laser onto a CMOS inverter chip
Author :
Daryanani, S. ; Fathollahnejad, H. ; Mathine, D.L. ; Droopad, Ravi ; Maracas, G.N.
Author_Institution :
Center for Solid State Electron. Res., Arizona State Univ., Tempe, AZ
fDate :
5/11/1995 12:00:00 AM
Abstract :
An InGaAs-AlGaAs vertical cavity surface emitting laser has been integrated following substrate removal onto a CMOS inverter chip. Digital modulation of the laser is shown
Keywords :
CMOS logic circuits; III-V semiconductors; aluminium compounds; gallium arsenide; indium compounds; integrated optoelectronics; laser cavity resonators; optical modulation; semiconductor lasers; surface emitting lasers; CMOS inverter chip; InGaAs-AlGaAs; VCSEL; digital laser modulation; logic IC; surface emitting laser; vertical-cavity SEL;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19950556
