Frequency Multiplexed MEMS Actuators and Switches

Author

Wang, Minfeng ; Zhang, Yang ; Li, G.P. ; Bachman, Mark

Author_Institution

Dept. of Electr. Eng., Univ. of California, Irvine, Irvine, CA, USA

Volume

34

Issue

1

fYear

2013

fDate

Jan. 2013

Firstpage

132

Lastpage

134

Abstract

We report a novel method for addressing a set of microelectromechanical system (MEMS) actuators using an oscillating signal to drive an actuator into resonance and then into a latched state. Based on the unique frequency response characteristics of individual actuators, multiplexed addressing of multiple devices in an array can be accomplished by selecting and combining appropriate driving signals on a single control line. This simplified control architecture of MEMS actuators eases implementation of multiple devices and enables large-scale integration of programmable microactuator systems, such as MEMS switch arrays.

Keywords

microactuators; microswitches; MEMS switch arrays; MEMS switches; control architecture; frequency multiplexed MEMS actuators; frequency response characteristics; latched state; microelectromechanical system actuators; programmable microactuator system; Actuators; Arrays; Frequency division multiplexing; Micromechanical devices; Resonant frequency; Actuators; addressable microelectromechanical system (MEMS); electromagnetic actuation; latching; switch array;

fLanguage

English

Journal_Title

Electron Device Letters, IEEE

Publisher

ieee

ISSN

0741-3106

Type

jour

DOI

10.1109/LED.2012.2224312

Filename

6363519