Modeling of periodic distributed MEMS-application to the design of variable true-time delay lines

Author

Perruisseau-Carrier, Julien ; Fritschi, R. ; Crespo-Valero, P. ; Skrivervik, A.K.

Author_Institution

Ecole Polytechnique Fed. de Lausanne, Lab. of Electromagn. & Acoust., Lausanne

Volume

54

Issue

1

fYear

2006

Firstpage

383

Lastpage

392

Abstract

This paper presents the modeling and design methods of true-time distributed microelectromechanical systems transmission lines (DMTLs) making use of periodic structure theory. New contributions to the analysis and reduction of the microelectromechanical systems (MEMS) shunt capacitors parasitics are also introduced. A prototype of a digital DMTL has been fabricated and measured, showing very good agreement with the comprehensive circuit model used for the design. It is believed that the periodic structure approach presented could be useful for other microwave periodic MEMS devices

Keywords

capacitors; delay lines; micromechanical devices; microwave devices; periodic structures; transmission lines; distributed microelectromechanical systems transmission lines; microwave periodic MEMS devices; periodic distributed MEMS-application; periodic structure theory; shunt capacitor parasitics; variable true-time delay lines; Capacitors; Delay lines; Design methodology; Distributed parameter circuits; Microelectromechanical systems; Micromechanical devices; Periodic structures; Prototypes; Transmission line measurements; Transmission line theory; Distributed microelectromechanical systems transmission line (DMTL); microelectromechanical systems (MEMS); periodic structure; true-time delay lines (TTDLs);

fLanguage

English

Journal_Title

Microwave Theory and Techniques, IEEE Transactions on

Publisher

ieee

ISSN

0018-9480

Type

jour

DOI

10.1109/TMTT.2005.860297

Filename

1573835