DocumentCode

790907

Title

Effects of Incident Angle of Sputtered Particles to Substrate for the Formation of Co-Cr Films

Author

Hoshi, Y. ; Nihei, K. ; Seki, M. ; Naoe, M.

Author_Institution

Tokyo Inst. of Polytechnics

Volume

3

Issue

6

fYear

1988

fDate

6/1/1988 12:00:00 AM

Firstpage

506

Lastpage

508

Keywords

Crystallization; Diffraction; Grain size; Joining processes; Magnetic films; Magnetic properties; Magnetics Society; Particle scattering; Sputtering; Substrates;

fLanguage

English

Journal_Title

Magnetics in Japan, IEEE Translation Journal on

Publisher

ieee

ISSN

0882-4959

Type

jour

DOI

10.1109/TJMJ.1988.4563762

Filename

4563762