Title :
Effects of Incident Angle of Sputtered Particles to Substrate for the Formation of Co-Cr Films
Author :
Hoshi, Y. ; Nihei, K. ; Seki, M. ; Naoe, M.
Author_Institution :
Tokyo Inst. of Polytechnics
fDate :
6/1/1988 12:00:00 AM
Keywords :
Crystallization; Diffraction; Grain size; Joining processes; Magnetic films; Magnetic properties; Magnetics Society; Particle scattering; Sputtering; Substrates;
Journal_Title :
Magnetics in Japan, IEEE Translation Journal on
DOI :
10.1109/TJMJ.1988.4563762
