High coercivity in Co-Cr films induced by nitrogen gas addition during room temperature sputter-deposition

Author

Hoada, N. ; Chiba, T. ; Ouchi, K. ; Iwasaki, S.

Author_Institution

Akita Res. Inst. of Adv. Technol., Akita, Japan

Volume

31

Issue

6

fYear

1995

fDate

11/1/1995 12:00:00 AM

Firstpage

2758

Lastpage

2760

Abstract

Nitrogen gas addition was investigated for deposition of Co-Cr films at room temperature. It was found that nitrogen addition has a remarkable effect on increasing perpendicular coercivity Hc_⊥ for films deposited at high Ar pressures although negligible amount of nitrogen was observed in the films. The increase in He, was interpreted in terms of a microstructure change which is characterized by development of an isolated structure accompanied by grain size reduction. Films deposited at low Ar pressures exhibited only little increase in He, with the nitrogen gas addition. Also, nitrogen inclusion and a lattice expansion were observed for these films

Keywords

chromium alloys; cobalt alloys; coercive force; ferromagnetic materials; grain size; magnetic thin films; perpendicular magnetic recording; sputter deposition; CoCr; N₂; grain size reduction; isolated structure; lattice expansion; microstructure change; perpendicular coercivity; sputter deposition; Anisotropic magnetoresistance; Argon; Coercive force; Compressive stress; Lattices; Magnetic films; Nitrogen; Optical films; Sputtering; Temperature;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.490142

Filename

490142