DocumentCode
792720
Title
Silicon micromachined electromagnetic microactuators for rigid disk drives
Author
Tang, Weilong ; Temesvary, Viktoria ; Miller, Raanan ; Desai, Amish ; Tai, Yu-Chong ; Miu, Denny E.
Author_Institution
Mech. Eng., California Univ., Los Angeles, CA, USA
Volume
31
Issue
6
fYear
1995
fDate
11/1/1995 12:00:00 AM
Firstpage
2964
Lastpage
2966
Abstract
It is projected that by the year 2001, the disk drive industry will be shipping products with track density on the order of 25,000 tracks-per-inch, which would require a servo bandwidth of at least 3 kHz. This paper presents initial fabrication results of an industry and government supported research project at Caltech and UCLA to develop piggyback electromagnetically driven microactuators for such applications, which are fabricated using the state-of-the-art silicon micromachining techniques
Keywords
hard discs; microactuators; micromachining; silicon; 3 kHz; fabrication; piggyback electromagnetic microactuators; rigid disk drives; servo bandwidth; silicon micromachining; track density; Bandwidth; Disk drives; Fabrication; Government; Microactuators; Micromachining; Servomechanisms; Shipbuilding industry; Silicon; Textile industry;
fLanguage
English
Journal_Title
Magnetics, IEEE Transactions on
Publisher
ieee
ISSN
0018-9464
Type
jour
DOI
10.1109/20.490204
Filename
490204
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