A thin-film piezoelectric impact sensor array fabricated on a Si slider for measuring head-disk interaction

Author

Imai, S. ; Tokuyama, M. ; Hirose, S. ; Burger, G.J. ; Lammerink, T.S.J. ; Fluitman, J.H.J.

Author_Institution

Mech. Eng. Res. Lab., Hitachi Ltd., Ibaraki, Japan

Volume

31

Issue

6

fYear

1995

fDate

11/1/1995 12:00:00 AM

Firstpage

3009

Lastpage

3011

Abstract

A new type of acoustic emission sensor using a thin film piezoelectric material (sputtered ZnO) was developed for measuring head-disk interaction in a rigid magnetic disk system. The sensor is mounted on a Si slider (length: 3 mm) and was fabricated using micro-machining techniques in our on-going efforts to downsize sliders. Some fundamental tests of the sensor were conducted: sensitivity and frequency characteristics, and a flying test over a rotating bump disk

Keywords

acoustic emission testing; hard discs; impact testing; magnetic recording; micromachining; piezoelectric transducers; zinc compounds; 3 mm; Si; ZnO-Si; acoustic emission sensor; flying test; frequency characteristics; head-disk interaction; micro-machining techniques; piezoelectric impact sensor array; rigid magnetic disk system; rotating bump disk; sensitivity characteristics; slider downsizing; thin film piezoelectric material; Acoustic sensors; Magnetic films; Magnetic sensors; Piezoelectric films; Semiconductor thin films; Sensor arrays; Sensor phenomena and characterization; Sensor systems; Sputtering; Thin film sensors;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.490253

Filename

490253