• DocumentCode
    793566
  • Title

    Multichip packaging technology with laser-patterned interconnects

  • Author

    Barfknecht, Andrew T. ; Tuckerman, David B. ; Kaschmitter, James L. ; McWilliams, Bruce M.

  • Volume
    12
  • Issue
    4
  • fYear
    1989
  • fDate
    12/1/1989 12:00:00 AM
  • Firstpage
    646
  • Lastpage
    649
  • Abstract
    A multichip silicon-on-silicon packaging technology has been developed which incorporates laser-patterned thin-film interconnects. This technology is particularly suited for application in high-speed, high-power, and high-I/O systems, where its unique characteristics provide many advantages over more traditional methods. The laser-patterned thin-film interconnects allow higher I/O densities and better electrical performance than wire bonds or TAB (tape automated bonding). The face-up, thin-film eutectic die attach technique used provides much lower thermal resistance between the substrate and the chips than can be achieved with solder bump die attach. In addition, laser-patterned interconnects demonstrate superior ruggedness and fatigue resistance under thermomechanical cycling and shock. This technology has been used to produce a ten-chip memory module, samples of which have been subjected to testing by means of relevant methods of MIL-STD 883C
  • Keywords
    laser beam machining; modules; packaging; thermal resistance; I/O densities; MIL-STD 883C; Si-Si; electrical performance; fatigue resistance; high speed-systems; high-I/O systems; high-power systems; laser-patterned thin-film interconnects; multichip silicon-on-silicon packaging technology; solder bump die attach; tape automated bonding; ten-chip memory module; thermal resistance; thermomechanical cycling; thermomechanical shock; thin-film eutectic die attach technique; wire bonds; Bonding; Electric resistance; Fatigue; Microassembly; Packaging; Semiconductor thin films; Substrates; Thermal resistance; Transistors; Wire;
  • fLanguage
    English
  • Journal_Title
    Components, Hybrids, and Manufacturing Technology, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0148-6411
  • Type

    jour

  • DOI
    10.1109/33.49028
  • Filename
    49028