DocumentCode
793813
Title
Constriction resistance of microcone-based contacts
Author
Gu, Jin Jin ; Warner, Keith ; Qin, Shu ; Chan, Chung
Author_Institution
Lasertron Inc., Burlington, MA, USA
Volume
18
Issue
2
fYear
1995
fDate
6/1/1995 12:00:00 AM
Firstpage
385
Lastpage
389
Abstract
Based on a recently developed semiconductor processing technique for field emitters, molybdenum cones are made on the surface of contact members to achieve low constriction resistance. A model was set up to calculate the constriction resistance of such a cone-based contact interface. The constriction resistance is obtained from the solution to a linear system of current flow equations for the contact structure. The effects of surface features such as number, size and distribution of microcontacts, and cluster area on the constriction resistance were evaluated by a computer simulation. The least-square optimization of numerical results led to an empirical expression which relates the constriction resistance to the cone radius, cone density and cluster area. The model predicts the reduction of constriction resistance as a function of cone density, and it agrees well with the experimental results
Keywords
contact resistance; current distribution; electrical contacts; least squares approximations; molybdenum; optimisation; simulation; surface topography; Mo; Mo cones; cluster area; computer simulation; cone density; cone radius; cone-based contact interface; constriction resistance; current flow equations; least-square optimization; microcone-based contacts; model; surface features; Computer simulation; Contact resistance; Equations; Fabrication; Linear systems; Predictive models; Senior members; Solid state circuits; Surface contamination; Surface resistance;
fLanguage
English
Journal_Title
Components, Packaging, and Manufacturing Technology, Part A, IEEE Transactions on
Publisher
ieee
ISSN
1070-9886
Type
jour
DOI
10.1109/95.390321
Filename
390321
Link To Document