Title :
Cerium substituted YIG single crystalline film prepared with ultra-high-vacuum magnetron sputtering
Author :
Okamura, Y. ; Kubota, J. ; Yamamoto, S.
Author_Institution :
Dept. of Electr. Eng., Osaka Univ., Japan
fDate :
11/1/1995 12:00:00 AM
Abstract :
This paper is concerned with the preparation of cerium substituted yttrium iron garnet which is known to be an oxide with a large magneto-optic effect. Using magnetron sputtering we successfully grew an epitaxial film on a nonmagnetic substrate. Here we investigate the conditions of the single crystal film growth by use of the sputtering technique: dependence of the lattice constant and the Faraday coefficient on the oxygen flow rate and the sputtering pressure. The obtained films are different from the films reported previously
Keywords :
Faraday effect; X-ray diffraction; cerium compounds; garnets; lattice constants; magnetic epitaxial layers; sputter deposition; yttrium compounds; Ce-YIG single crystalline film; CeY2Fe5O12; Faraday coefficient; O2 flow rate; X-ray diffraction pattern; epitaxial film; garnet; large magneto-optic effect; lattice constant; nonmagnetic substrate; single crystal film growth; specific Faraday rotation; sputtering pressure; ultra-high-vacuum magnetron sputtering; Cerium; Crystallization; Garnet films; Iron; Magnetooptic effects; Optical films; Optical waveguides; Particle beam optics; Sputtering; Substrates;
Journal_Title :
Magnetics, IEEE Transactions on