Title :
Effect of copper phthalocyanine layer thickness on properties of SAW NO2 sensor
Author :
Hechner, J. ; Soluch, W.
Author_Institution :
Inst. of Electron. Mater. Technol., Warsaw, Poland
fDate :
7/18/2002 12:00:00 AM
Abstract :
Insertion loss changes of a surface acoustic wave (SAW) delay line fabricated on the 128°YX LiNbO3 crystal, caused by a copper phthalocyanine adsorption of NO2, were measured at a frequency of 70 MHz. It was found, that to obtain a maximum change of the insertion loss for 20 ppm concentration of NO2 at a temperature of 130°C, the layer thickness should be about 1.5 μm. This layer can be used for NO2 concentration measurements in the range from about 1 to 500 ppm
Keywords :
gas sensors; lithium compounds; losses; nitrogen compounds; surface acoustic wave delay lines; surface acoustic wave sensors; 1.5 micron; 130 degC; 70 MHz; LiNbO3; NO2; SAW sensor; concentration measurements; copper phthalocyanine layer; delay line; insertion loss changes; layer thickness;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20020560
