Glass waveguides on silicon for hybrid optical packaging

Author

Henry, C.H. ; Blonder, G.E. ; Kazarinov, R.F.

Author_Institution

AT&T Bell Labs., Murray Hill, NJ, USA

Volume

7

Issue

10

fYear

1989

fDate

10/1/1989 12:00:00 AM

Firstpage

1530

Lastpage

1539

Abstract

Work on deposited glass waveguides on silicon to form waveguides and filters is reviewed. The choice of these particular waveguides makes sense only as part of a consistent approach to optoelectronic packaging. Hybrid optical packaging on silicon (HOPS) is described and briefly compared with other techniques. For these packages, two waveguides were developed: a tight mode waveguide with a silicon nitride rib core for matching a semiconductor laser and a loose mode waveguide with a phosphosilicate glass core for matching an optical fiber

Keywords

integrated optoelectronics; optical fibres; optical filters; optical glass; optical waveguides; reviews; semiconductor junction lasers; silicon; HOPS; Si; Si₃N₄; SiO₂-P₂O₅; deposited glass waveguides; hybrid optical packaging; integrated optoelectronics; loose mode waveguide; optical fiber; optical fibre matching; optical filters; optoelectronic packaging; phosphosilicate glass core; semiconductor laser; semiconductor laser matching; silicon nitride rib core; spatial filters; tight mode waveguide; Fiber lasers; Glass; Laser modes; Optical filters; Optical sensors; Optical waveguide components; Optical waveguides; Semiconductor device packaging; Semiconductor waveguides; Silicon;

fLanguage

English

Journal_Title

Lightwave Technology, Journal of

Publisher

ieee

ISSN

0733-8724

Type

jour

DOI

10.1109/50.39094

Filename

39094