Title :
External circuit system effects on chlorine plasma instabilities
Author :
Ellingboe, A.R. ; Law, V.J. ; Soberon, F. ; Garcia, F. ; Graham, W.
Author_Institution :
Nat. Centre for Plasma Sci. & Technol., Dublin City Univ., Ireland
fDate :
4/28/2005 12:00:00 AM
Abstract :
The effects of the external circuit on plasma instabilities in an inductive plasma source are investigated. The instabilities are found to be asymmetric with respect to the circuit input impedance. A simplified model of the antenna-plasma coupling provides an explanation of the asymmetry.
Keywords :
antennas in plasma; chlorine; electric impedance; equivalent circuits; plasma chemistry; plasma instability; plasma sources; Cl; antenna plasma coupling; asymmetric instability; chlorine plasma instability; circuit input impedance; external circuit system; inductive plasma source;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20050424
