• DocumentCode
    796264
  • Title

    Co-Cr Thin Films Deposited on Substrates with Island Structure

  • Author

    Kawawake, Y. ; Honda, K. ; Sugita, R. ; Tohma, K. ; Ishida, T. ; Nakamura, Y.

  • Author_Institution
    Matsushita Electric Ind. Co., Ltd.
  • Volume
    5
  • Issue
    11
  • fYear
    1990
  • Firstpage
    903
  • Lastpage
    909
  • Abstract
    The effect of substrate morphology on the perpendicular anisotropy of Co-Cr films was studied. Co-Cr layers were deposited on top of Al-3 wt% Cu underlayers; the latter were of thickness 1.5 to 40 nm and were deposited at a substrate temperature of from 25 to 300°C. SEM photographs revealed an island structure for the Al-Cu films deposited at 300°C, while those deposited at 25°C had a flat surface. The ¿ ¿50 and Hkeff of Co-Cr films on Al-Cu underlayers deposited at 300°C were about 15° and 2 kOe respectively, while the figures when the Al-Cu layer was deposited at 25°C were under 10° and about 3 kOe respectively. The morphology of the Al-Cu underlayer thus greatly influenced the perpendicular anisotropy of the Co-Cr film.
  • Keywords
    Anisotropic magnetoresistance; Crystallization; Magnetic films; Perpendicular magnetic anisotropy; Scanning electron microscopy; Shape; Sputtering; Substrates; Surface morphology; Temperature;
  • fLanguage
    English
  • Journal_Title
    Magnetics in Japan, IEEE Translation Journal on
  • Publisher
    ieee
  • ISSN
    0882-4959
  • Type

    jour

  • DOI
    10.1109/TJMJ.1990.4564374
  • Filename
    4564374