Title :
Phase-sensitive CMOS photo-circuit array for modulated thermoreflectance measurements
Author :
Pitter, M.C. ; Goh, J.Y.L. ; Somekh, M.G. ; Hayes-Gill, B.R. ; Clark, M. ; Morgan, S.P.
Author_Institution :
Sch. of Electr. & Electron. Eng., Univ. of Nottingham, UK
Abstract :
A scalable 4×4 array of photodiodes and circuitry has been fabricated and used to make spatially resolved measurements of surface wave enhanced modulated thermoreflectance. In-phase and quadrature components of the modulated light at every pixel are measured in parallel, even in the presence of a large DC background.
Keywords :
CMOS integrated circuits; arrays; integrated optoelectronics; photodetectors; photodiodes; thermal variables measurement; thermoreflectance; CMOS photo-circuit array; in-phase components; modulated light; modulated thermoreflectance measurements; phase-sensitive photo-circuit array; photodiodes; quadrature components; scalable array; spatially resolved measurements; surface wave enhanced thermoreflectance;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:20030835
